Hitchon, W. N. G. (1999). Plasma processes for semiconductor fabrication. Cambridge University Press.
Dyfyniad Arddull ChicagoHitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge: Cambridge University Press, 1999.
Dyfyniad MLAHitchon, W. Nicholas G. Plasma Processes for Semiconductor Fabrication. Cambridge University Press, 1999.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.