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Micromanufacturing and nanotechnology

书目详细资料
主要作者:	Mahalik, N.P.[ed.] (ed.by)
格式:	Printed Book
语言:	English
出版:	Germany Springer- Verlag 2006
主题:	Nanotechnology > Micro manufacturing > Microelectromechanical system (MEMS) > Micro-opto-electro-mechanical system (MOEMS) > (MEMS) > (MOEMS)

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