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Non-destructive evaluation of ion implanted semiconductor thin films using photothermal deflection spectroscopy

Bibliographic Details
Main Author:	Paulraj, M.
Other Authors:	Vijayakumar, K. P (Guide)
Format:	Printed Book
Language:	English
Published:	Cochin: Cochin University of Science and Techonology, 2004.
Subjects:	Thin film

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