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Hydrogenated amorphous silicon alloy deposition processes /

Bibliografiske detaljer
Hovedforfatter:	Luft, Werner
Andre forfattere:	Tsuo, Y. Simon
Format:	Printed Book
Sprog:	English
Udgivet:	New York : M. Dekker, c1993.
Serier:	Applied physics series (Marcel Dekker, Inc.) ; 1.
Fag:	Thin film devices--Design and construction > Silicon alloys > Plasma-enhanced chemical vapor deposition > Thin films--Optical properties > Thin films--Electric properties.

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