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Hydrogenated amorphous silicon alloy deposition processes /
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| Other Authors: | |
| Format: | Printed Book |
| Language: | English |
| Published: |
New York :
M. Dekker,
c1993.
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| Series: | Applied physics series (Marcel Dekker, Inc.) ;
1. |
| Subjects: |
| Physical Description: | xiv, 327 p. : ill. ; 24 cm. |
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| ISBN: | 0824791460 |