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Principles and applications of NanoMEMS physics /
| 主要作者: | |
|---|---|
| 格式: | Printed Book |
| 语言: | English |
| 出版: |
New Delhi:
Springer,
c2005.
|
| 丛编: | Microsystems (Series) ;
v. 15. |
| 主题: |
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