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Principles and applications of NanoMEMS physics /
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Language: | English |
| Published: |
New Delhi:
Springer,
c2005.
|
| Series: | Microsystems (Series) ;
v. 15. |
| Subjects: |
PHY
| Call Number: |
537.5 SAN |
|---|---|
| Copy | Live Status Unavailable |