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Principles and applications of NanoMEMS physics /
| Egile nagusia: | |
|---|---|
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
New Delhi:
Springer,
c2005.
|
| Saila: | Microsystems (Series) ;
v. 15. |
| Gaiak: |
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