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Principles and applications of NanoMEMS physics /

書目詳細資料
主要作者:	Santos, Hector J. de los
格式:	Printed Book
語言:	English
出版:	New Delhi: Springer, c2005.
叢編:	Microsystems (Series) ; v. 15.
主題:	Quantum electronics > Wave-particle duality > Nanotechnology > Microelectromechanical systems

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