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Principles and applications of NanoMEMS physics /

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Detalhes bibliográficos
Autor principal:	Santos, Hector J. de los
Formato:	Printed Book
Idioma:	English
Publicado em:	New Delhi: Springer, c2005.
Colecção:	Microsystems (Series) ; v. 15.
Assuntos:	Quantum electronics > Wave-particle duality > Nanotechnology > Microelectromechanical systems

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