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Principles and applications of NanoMEMS physics /
| Príomhúdar: | Santos, Hector J. de los |
|---|---|
| Formáid: | Printed Book |
| Teanga: | English |
| Foilsithe: |
New Delhi:
Springer,
c2005.
|
| Sraith: | Microsystems (Series) ;
v. 15. |
| Ábhair: |
Míreanna Comhchosúla
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