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Principles and applications of NanoMEMS physics /

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Bibliografiske detaljer
Hovedforfatter:	Santos, Hector J. de los
Format:	Printed Book
Sprog:	English
Udgivet:	New Delhi: Springer, c2005.
Serier:	Microsystems (Series) ; v. 15.
Fag:	Quantum electronics > Wave-particle duality > Nanotechnology > Microelectromechanical systems

Lignende værker

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Quantum Mechanics:a modern introduction
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Scaling issues and design of MEMS
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MEMS and microsystems: design and manufacture
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Microsensor, MEMS and smart devices
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Nanotribology: critical assessment and research needs
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