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Principles and applications of NanoMEMS physics /

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Dades bibliogràfiques
Autor principal:	Santos, Hector J. de los
Format:	Printed Book
Idioma:	English
Publicat:	New Delhi: Springer, c2005.
Col·lecció:	Microsystems (Series) ; v. 15.
Matèries:	Quantum electronics > Wave-particle duality > Nanotechnology > Microelectromechanical systems

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