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Principles and applications of NanoMEMS physics /

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Bibliographic Details
Main Author:	Santos, Hector J. de los
Format:	Printed Book
Language:	English
Published:	New Delhi: Springer, c2005.
Series:	Microsystems (Series) ; v. 15.
Subjects:	Quantum electronics > Wave-particle duality > Nanotechnology > Microelectromechanical systems

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