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Principles and applications of NanoMEMS physics /
| 主要作者: | |
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| 格式: | Printed Book |
| 語言: | English |
| 出版: |
New Delhi:
Springer,
c2005.
|
| 叢編: | Microsystems (Series) ;
v. 15. |
| 主題: |
PHY
| 索引號: |
537.5 SAN |
|---|---|
| 復印件 | Live Status Unavailable |