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050601s2005 ne a b 001 0 eng |
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|a 537.5
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| 100 |
1 |
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|a Santos, Hector J. de los.
|9 8370
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| 245 |
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|a Principles and applications of NanoMEMS physics /
|c by Héctor J. De Los Santos.
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| 300 |
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|a xv, 254 p. :
|b ill. ;
|c 25 cm.
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| 490 |
1 |
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|a Microsystems ;
|v 15
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| 653 |
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|a Quantum electronics
|a Wave-particle duality
|a Nanotechnology
|a Microelectromechanical systems
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| 942 |
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|c BK
|6 _
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| 260 |
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|a New Delhi:
|b Springer,
|c c2005.
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| 020 |
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|a 1402032382
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| 830 |
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0 |
|a Microsystems (Series) ;
|v v. 15.
|9 8369
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| 999 |
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|s 2015-01-06
|w 2010-12-13
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