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Principles and applications of NanoMEMS physics /
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| 格式: | Printed Book |
| 语言: | English |
| 出版: |
New Delhi:
Springer,
c2005.
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| 丛编: | Microsystems (Series) ;
v. 15. |
| 主题: |
| 实物描述: | xv, 254 p. : ill. ; 25 cm. |
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| ISBN: | 1402032382 |