載入...
Principles and applications of NanoMEMS physics /
| 主要作者: | |
|---|---|
| 格式: | Printed Book |
| 語言: | English |
| 出版: |
New Delhi:
Springer,
c2005.
|
| 叢編: | Microsystems (Series) ;
v. 15. |
| 主題: |
| 實物描述: | xv, 254 p. : ill. ; 25 cm. |
|---|---|
| ISBN: | 1402032382 |