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Principles and applications of NanoMEMS physics /
| Egile nagusia: | |
|---|---|
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
New Delhi:
Springer,
c2005.
|
| Saila: | Microsystems (Series) ;
v. 15. |
| Gaiak: |
| Deskribapen fisikoa: | xv, 254 p. : ill. ; 25 cm. |
|---|---|
| ISBN: | 1402032382 |