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Principles and applications of NanoMEMS physics /
| Main Author: | |
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| Format: | Printed Book |
| Language: | English |
| Published: |
New Delhi:
Springer,
c2005.
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| Series: | Microsystems (Series) ;
v. 15. |
| Subjects: |
| Physical Description: | xv, 254 p. : ill. ; 25 cm. |
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| ISBN: | 1402032382 |