Santos, H. J. d. l. (2005). Principles and applications of NanoMEMS physics. Springer.
Chicago Edition CitationSantos, Hector J. de los. Principles and Applications of NanoMEMS Physics. New Delhi: Springer, 2005.
Cita MLASantos, Hector J. de los. Principles and Applications of NanoMEMS Physics. Springer, 2005.
Atenció: Aquestes cites poden no estar 100% correctes.