Santos, H. J. d. l. (2005). Principles and applications of NanoMEMS physics. Springer.
Dyfyniad Arddull ChicagoSantos, Hector J. de los. Principles and Applications of NanoMEMS Physics. New Delhi: Springer, 2005.
Dyfyniad MLASantos, Hector J. de los. Principles and Applications of NanoMEMS Physics. Springer, 2005.
Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.