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Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.
| Autor Principal: | |
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| Formato: | Printed Book |
| Idioma: | English |
| Publicado: |
New York,
IFI/Plenum,
1971-72.
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| Series: | Handbook of electronic materials ;
v. 3, etc. |
| Subjects: |
PHY
| Número de Clasificación: |
621.381/7 MIL.3 621.381/7 MIL.6 |
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| Copia | Live Status Unavailable |
| Copia | Live Status Unavailable |