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Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.
| Prif Awdur: | |
|---|---|
| Fformat: | Printed Book |
| Iaith: | English |
| Cyhoeddwyd: |
New York,
IFI/Plenum,
1971-72.
|
| Cyfres: | Handbook of electronic materials ;
v. 3, etc. |
| Pynciau: |
PHY
| Rhif Galw: |
621.381/7 MIL.3 621.381/7 MIL.6 |
|---|---|
| Copi | Nid yw'r Statws Byw ar Gael |
| Copi | Nid yw'r Statws Byw ar Gael |