Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.

Detalles Bibliográficos
Autor principal: Milek, John T.
Formato: Printed Book
Lenguaje:English
Publicado: New York, IFI/Plenum, 1971-72.
Colección:Handbook of electronic materials ; v. 3, etc.
Materias:
Microelectronics--Materials. > Silicon nitride

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