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Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Language: | English |
| Published: |
New York,
IFI/Plenum,
1971-72.
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| Series: | Handbook of electronic materials ;
v. 3, etc. |
| Subjects: |