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Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.
| Auteur principal: | |
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| Format: | Printed Book |
| Langue: | English |
| Publié: |
New York,
IFI/Plenum,
1971-72.
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| Collection: | Handbook of electronic materials ;
v. 3, etc. |
| Sujets: |
| Description matérielle: | 6 v. illus. 28 cm. |
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| ISBN: | 0306671034 |