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Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.

Bibliografiske detaljer
Hovedforfatter: Milek, John T.
Format: Printed Book
Sprog:English
Udgivet: New York, IFI/Plenum, 1971-72.
Serier:Handbook of electronic materials ; v. 3, etc.
Fag:
Beskrivelse
Fysisk beskrivelse:6 v. illus. 28 cm.
ISBN:0306671034