Milek, J. T. (1971). Silicon nitride for microelectronic applications: 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices. IFI/Plenum.
Chicago Stili AlıntıMilek, John T. Silicon Nitride for Microelectronic Applications: 6v.; V3. & V6. Silicon Nitiride for Microelectronic Applications, Pt. 1. Preparation and Properties., Pt. 2. Applications and Devices. New York: IFI/Plenum, 1971.
MLA AlıntıMilek, John T. Silicon Nitride for Microelectronic Applications: 6v.; V3. & V6. Silicon Nitiride for Microelectronic Applications, Pt. 1. Preparation and Properties., Pt. 2. Applications and Devices. IFI/Plenum, 1971.
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