APA Edition Citation

Milek, J. T. (1971). Silicon nitride for microelectronic applications: 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices. IFI/Plenum.

Chicago Edition Citation

Milek, John T. Silicon Nitride for Microelectronic Applications: 6v.; V3. & V6. Silicon Nitiride for Microelectronic Applications, Pt. 1. Preparation and Properties., Pt. 2. Applications and Devices. New York: IFI/Plenum, 1971.

MLA Edition Citation

Milek, John T. Silicon Nitride for Microelectronic Applications: 6v.; V3. & V6. Silicon Nitiride for Microelectronic Applications, Pt. 1. Preparation and Properties., Pt. 2. Applications and Devices. IFI/Plenum, 1971.