Laser microfabrication : thin film processes and lithography /

Manylion Llyfryddiaeth
Awduron Eraill: Ehrlich, Daniel J., ed, Tsao, Jeffrey Y., ed
Fformat: Printed Book
Iaith:English
Cyhoeddwyd: Boston : Academic Press, c1989.
Pynciau:
Lasers--Industrial applications. > Thin film devices--Design and construction. > Microlithography. > Microlithography.

PHY

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Rhif Galw: 621.36/6 EHR
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