Laser microfabrication : thin film processes and lithography /

Bibliographic Details
Other Authors: Ehrlich, Daniel J., ed, Tsao, Jeffrey Y., ed
Format: Printed Book
Language:English
Published: Boston : Academic Press, c1989.
Subjects:
Lasers--Industrial applications. > Thin film devices--Design and construction. > Microlithography. > Microlithography.
Description
Physical Description:xii, 587 p. : ill. ; 24 cm.
ISBN:0122334302

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