Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /

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Korporativní autor: United States. Air Force. Office of Scientific Research
Další autoři: Osgood, R. M., ed, Brueck, S. R. J., ed, Schlossberg, H. R., ed
Médium: Printed Book
Jazyk:English
Vydáno: New York : North-Holland, c1983.
Edice:Material research society symposia proceedings; v. 17
Témata:
Lasers--Industrial applications--Congresses. > Semiconductors--Congresses.
Popis
Popis jednotky:"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
Fyzický popis:xiii, 298 p. : ill. ; 24 cm.
ISBN:0444007822

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