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Microelectronic polymers

Détails bibliographiques
Auteur principal:	Htoo, Maung S. (Auteur)
Format:	Printed Book
Langue:	English
Publié:	New York M. Dekker 1989.
Sujets:	Polymers > Microlithography--Materials > Microelectronics--Materials. > Polymers-application > Microelectronics-materials > Polymers-application in microelectronics > Lithographic polymers

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