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00688nam a22001697a 4500 |
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20151026130106.0 |
| 008 |
090827t xxu||||| |||| 00| 0 eng d |
| 080 |
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|a 621.3.049.77
|b SIV
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| 100 |
|
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|a Sivaraman, S.
|9 3522
|
| 245 |
|
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|a Chemical vaper deposition, Thermal & plasma deposition of electronic materials
|
| 300 |
|
|
|a xii, 292p.
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| 653 |
|
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|a Microelectronics industry
|a Chemical vapour deposition
|a Micro electronics-materials
|
| 942 |
|
|
|c BK
|6 _
|
| 260 |
|
|
|a New York
|b Van Nostrand reinheld
|c 1995
|9 3523
|
| 020 |
|
|
|a 0-442-01079-6
|
| 999 |
|
|
|c 1590
|d 1590
|
| 952 |
|
|
|0 0
|1 0
|2 udc
|4 0
|6 621304977_SIV
|7 0
|9 6428
|a UL
|b UL
|d 2009-08-27
|l 7
|o 621.3.049.77 SIV
|p 00041594
|r 2014-10-09
|s 2014-09-29
|w 2009-08-27
|y BK
|