Chemical vaper deposition, Thermal & plasma deposition of electronic materials

Bibliographic Details
Main Author: Sivaraman, S.
Format: Printed Book
Language:English
Published: New York Van Nostrand reinheld 1995
Subjects:
Microelectronics industry > Chemical vapour deposition > Micro electronics-materials

UL

Holdings details from UL
Call Number: 621.3.049.77 SIV
Copy Live Status Unavailable

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