Loading...
Chemical vaper deposition, Thermal & plasma deposition of electronic materials
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Language: | English |
| Published: |
New York
Van Nostrand reinheld
1995
|
| Subjects: |
| Physical Description: | xii, 292p. |
|---|---|
| ISBN: | 0-442-01079-6 |