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Chemical vaper deposition, Thermal & plasma deposition of electronic materials
| Hovedforfatter: | |
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| Format: | Printed Book |
| Sprog: | English |
| Udgivet: |
New York
Van Nostrand reinheld
1995
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| Fag: |
| Fysisk beskrivelse: | xii, 292p. |
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| ISBN: | 0-442-01079-6 |