Sivaraman, S. (1995). Chemical vaper deposition, Thermal & plasma deposition of electronic materials. Van Nostrand reinheld.
シカゴスタイル引用形Sivaraman, S. Chemical Vaper Deposition, Thermal & Plasma Deposition of Electronic Materials. New York: Van Nostrand reinheld, 1995.
MLA引用形式Sivaraman, S. Chemical Vaper Deposition, Thermal & Plasma Deposition of Electronic Materials. Van Nostrand reinheld, 1995.
警告: この引用は必ずしも正確ではありません.