Sivaraman, S. (1995). Chemical vaper deposition, Thermal & plasma deposition of electronic materials. Van Nostrand reinheld.
Chicago Edition CitationSivaraman, S. Chemical Vaper Deposition, Thermal & Plasma Deposition of Electronic Materials. New York: Van Nostrand reinheld, 1995.
Deismireacht MLASivaraman, S. Chemical Vaper Deposition, Thermal & Plasma Deposition of Electronic Materials. Van Nostrand reinheld, 1995.
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