Sivaraman, S. (1995). Chemical vaper deposition, Thermal & plasma deposition of electronic materials. Van Nostrand reinheld.
Style de citation ChicagoSivaraman, S. Chemical Vaper Deposition, Thermal & Plasma Deposition of Electronic Materials. New York: Van Nostrand reinheld, 1995.
Style de citation MLASivaraman, S. Chemical Vaper Deposition, Thermal & Plasma Deposition of Electronic Materials. Van Nostrand reinheld, 1995.
Attention : ces citations peuvent ne pas être correctes à 100%.