Sivaraman, S. (1995). Chemical vaper deposition, Thermal & plasma deposition of electronic materials. Van Nostrand reinheld.
Chicago Edition CitationSivaraman, S. Chemical Vaper Deposition, Thermal & Plasma Deposition of Electronic Materials. New York: Van Nostrand reinheld, 1995.
MLA Edition CitationSivaraman, S. Chemical Vaper Deposition, Thermal & Plasma Deposition of Electronic Materials. Van Nostrand reinheld, 1995.
Warning: These citations may not always be 100% accurate.