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Nanolithography and patterning techniques in microelectronics / Project Report
| Egile nagusia: | |
|---|---|
| Beste egile batzuk: | |
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
c2005.
|
| Gaiak: | |
| Sarrera elektronikoa: | http://www.loc.gov/catdir/toc/fy0607/2006365086.html http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html |
Internet
http://www.loc.gov/catdir/toc/fy0607/2006365086.htmlhttp://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html
DAC
| Sailkapena: |
621.3815/31,BUC |
|---|---|
| Alea | Egoera zuzenean ez dago erabilgarri |