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Nanolithography and patterning techniques in microelectronics / Project Report
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| Other Authors: | |
| Format: | Printed Book |
| Language: | English |
| Published: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
c2005.
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| Subjects: | |
| Online Access: | http://www.loc.gov/catdir/toc/fy0607/2006365086.html http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html |
Internet
http://www.loc.gov/catdir/toc/fy0607/2006365086.htmlhttp://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html
DAC
| Call Number: |
621.3815/31,BUC |
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| Copy | Live Status Unavailable |