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Nanolithography and patterning techniques in microelectronics / Project Report

Bibliografiske detaljer
Hovedforfatter: Bucknall,David,G (ed.)
Andre forfattere: Bucknall, David G.
Format: Printed Book
Sprog:English
Udgivet: Cambridge : Boca Raton, FL : Woodhead Pub. ; CRC Press, c2005.
Fag:
Online adgang:http://www.loc.gov/catdir/toc/fy0607/2006365086.html
http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html