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Nanolithography and patterning techniques in microelectronics / Project Report
| Autor principal: | |
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| Formato: | Printed Book |
| Idioma: | English |
| Publicado em: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
c2005.
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| Assuntos: | |
| Acesso em linha: | http://www.loc.gov/catdir/toc/fy0607/2006365086.html http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html |