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Nanolithography and patterning techniques in microelectronics / Project Report
| 1. autor: | Bucknall,David,G (ed.) |
|---|---|
| Kolejni autorzy: | Bucknall, David G. |
| Format: | Printed Book |
| Język: | English |
| Wydane: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
c2005.
|
| Hasła przedmiotowe: | |
| Dostęp online: | http://www.loc.gov/catdir/toc/fy0607/2006365086.html http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html |
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