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Nanolithography and patterning techniques in microelectronics / Project Report
| Hoofdauteur: | Bucknall,David,G (ed.) |
|---|---|
| Andere auteurs: | Bucknall, David G. |
| Formaat: | Printed Book |
| Taal: | English |
| Gepubliceerd in: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
c2005.
|
| Onderwerpen: | |
| Online toegang: | http://www.loc.gov/catdir/toc/fy0607/2006365086.html http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html |
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