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Nanolithography and patterning techniques in microelectronics / Project Report
| Auteur principal: | |
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| Autres auteurs: | |
| Format: | Printed Book |
| Langue: | English |
| Publié: |
Cambridge : Boca Raton, FL :
Woodhead Pub. ; CRC Press,
c2005.
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| Sujets: | |
| Accès en ligne: | http://www.loc.gov/catdir/toc/fy0607/2006365086.html http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html |
Internet
http://www.loc.gov/catdir/toc/fy0607/2006365086.htmlhttp://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html
DAC
| Cote: |
621.3815/31,BUC |
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| Exemplaire | Statut en temps réel indisponible |