Nanolithography and patterning techniques in microelectronics / Project Report

Dettagli Bibliografici
Autore principale: Bucknall,David,G (ed.)
Altri autori: Bucknall, David G.
Natura: Printed Book
Lingua:English
Pubblicazione: Cambridge : Boca Raton, FL : Woodhead Pub. ; CRC Press, c2005.
Soggetti:
Nanolithography
Accesso online:http://www.loc.gov/catdir/toc/fy0607/2006365086.html
http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html
LEADER 00991cam a22002417a 4500
005 20160323130331.0
008 060112s2005 enka b 001 0 eng d
082 0 0 |a 621.3815/31  |b BUC 
100 |a Bucknall,David,G  |e ed.  |9 15524 
245 0 0 |a Nanolithography and patterning techniques in microelectronics /  |c edited by David G. Bucknall.  |b Project Report 
300 |a xiv, 409 p. :  |b ill. ;  |c 24 cm. 
653 |a Nanolithography  
700 1 |a Bucknall, David G.  |9 15523 
856 4 1 |u http://www.loc.gov/catdir/toc/fy0607/2006365086.html 
856 4 2 |u http://www.loc.gov/catdir/enhancements/fy0648/2006365086-d.html 
942 |c BK  |6 _ 
260 |a Cambridge :  |b Woodhead Pub. ;  |a Boca Raton, FL :  |b CRC Press,  |c c2005. 
020 |a 1855739313 (Woodhead) 
020 |a 0849334470 (CRC) 
020 |a 1845690907 (ebook) 
020 |a 9781855739314 
999 |c 156051  |d 156051 
952 |0 0  |1 0  |2 ddc  |4 0  |6 621381531BUC_  |7 0  |9 204065  |a DAC  |b DAC  |c REF  |d 2009-08-27  |o 621.3815/31,BUC  |p CHE3785  |r 2009-08-27  |w 2009-08-27  |y REF 

Documenti analoghi